Microsystem Design | 
| Author: Stephen D. Senturia
Publisher: Springer
Category: Book
List Price: $104.00
Buy Used: $55.00
You Save: $49.00 (47%)
New (28) Used (25) from $55.00
Avg. Customer Rating:  3 reviews
Sales Rank: 406812
Media: Hardcover
Number Of Items: 1
Pages: 720
Shipping Weight (lbs): 2.5
Dimensions (in): 9.4 x 6 x 1.6
ISBN: 0792372468
Dewey Decimal Number: 621.381
EAN: 9780792372462
ASIN: 0792372468
Publication Date: December 8, 2004
Availability: Usually ships in 1-2 business days
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Product Description
The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today's engineer working in the field of microelectromechanical systems (MEMS).
The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design' in the abstract, the book is organized around a set of Case Studies that are based on real products, or, where appropriately well-documented products could not be found, on thoroughly published prototype work.
The Case Studies were selected to sample a multidimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The Case Study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases.
This book is used for a graduate course in `Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional.
Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.
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| Customer Reviews:
 Very good reference June 16, 2008
This book is definitely a must-have for anyone interested in MEMS design. It's one of the classic references on microsystems that everyone should have read at least once.
The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.
To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.
not that useful as a textbook October 17, 2007
This book is good just for a starter's guide to MEMS. It just touches a wide range of topics. But if you want to learn the subject with real understanding, then this book can not help you.
 Review on microsystem design November 25, 2003
4 out of 6 found this review helpful
The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
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